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href="http://m.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://m.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導體材料</a>?吉林ICP材料刻蝕服務廣東省科學院半導體研究所供應</p><div id="kzwt7ax" class="leftbox clearfix"><h1>吉林ICP材料刻蝕服務廣東省科學院半導體研究所供應</h1><div id="auczgsm" class="proBig"><div id="bgi2z8m" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="shodu2a" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="uyvxzby" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關鍵詞：</span>吉林ICP材料刻蝕服務,材料刻蝕</p><p><span>***更新：</span>2020-12-28 06:22:58</p><p><span id="click" >瀏覽次數(shù)：3次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="q2i88yv" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學院半導體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="8l9obd3" class="page-proshow02"><p class="title">詳細說明</p><div id="p9k9sho" class="box"><p><p style="text-indent:25px">刻蝕是使用化學或者物理方法有選擇地從硅片表面去除不需要材料的過程，常用的設備為刻蝕機等。通常的晶圓加工流程中，刻蝕工藝位于光刻工藝之后，吉林ICP材料刻蝕服務，有圖形的光刻膠層在刻蝕中不會受到腐蝕源的明顯侵蝕，從而完成圖形轉(zhuǎn)移的工藝步驟。為在硅片表面材料上復制掩膜圖案，刻蝕需要滿足一定的參數(shù)，主要有：刻蝕速率、刻蝕剖面、刻蝕偏差和選擇比等?？涛g速率指刻蝕過程中去除硅片表面材料的速度；刻蝕剖面指的是刻蝕圖形的側(cè)壁形狀，通常分為各向同性和各向異性剖面；刻蝕偏差指的是線寬或關鍵尺寸間距的變化，通常由橫向鉆蝕引起；選擇比指的是同一刻蝕條件下兩種材料刻蝕速率比，高選擇比意味著不需要的材料會被刻除。干法刻蝕優(yōu)點是：各向異性好，選擇比高，吉林ICP材料刻蝕服務，吉林ICP材料刻蝕服務，可控性、靈活性、重復性好。吉林ICP材料刻蝕服務</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="吉林ICP材料刻蝕服務,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png"></div><p style="text-indent:25px">刻蝕技術(shù)（etchingtechnique），是在半導體工藝，按照掩模圖形或設計要求對半導體襯底表面或表面覆蓋薄膜進行選擇性腐蝕或剝離的技術(shù)。刻蝕技術(shù)不僅是半導體器件和集成電路的基本制造工藝，而且還應用于薄膜電路、印刷電路和其他微細圖形的加工。刻蝕還可分為濕法刻蝕和干法刻蝕。普通的刻蝕過程大致如下：先在表面涂敷一層光致抗蝕劑，然后透過掩模對抗蝕劑層進行選擇性曝光，由于抗蝕劑層的已曝光部分和未曝光部分在顯影液中溶解速度不同，經(jīng)過顯影后在襯底表面留下了抗蝕劑圖形，以此為掩模就可對襯底表面進行選擇性腐蝕。如果襯底表面存在介質(zhì)或金屬層，則選擇腐蝕以后，圖形就轉(zhuǎn)移到介質(zhì)或金屬層上。吉林ICP材料刻蝕服務刻蝕的基本目標是在涂膠的硅片上正確的復制掩模圖形。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="吉林ICP材料刻蝕服務,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png"></div><p style="text-indent:25px">二氧化硅的干法刻蝕：刻蝕原理氧化物的等離子體刻蝕工藝大多采用含有氟碳化合物的氣體進行刻蝕。使用的氣體有四氟化碳(CF)、八氟丙烷(C，F(xiàn)8)、三氟甲烷(CHF3)等，常用的是CF和CHFCF的刻蝕速率比較高但對多晶硅的選擇比不好，CHF3的聚合物生產(chǎn)速率較高，非等離子體狀態(tài)下的氟碳化合物化學穩(wěn)定性較高，且其化學鍵比SiF的化學鍵強，不會與硅或硅的氧化物反應。選擇比的改變在當今半導體工藝中，Si02的干法刻蝕主要用于接觸孔與金屬間介電層連接洞的非等向性刻蝕方面。前者在S102下方的材料是Si，后者則是金屬層，通常是TiN（氮化鈦），因此在Si02的刻蝕中，Si07與Si或TiN的刻蝕選擇比是一個比較重要的因素。</p><p style="text-indent:25px">在半導體制造中有兩種基本的刻蝕工藝：干法刻蝕和濕法腐蝕。干法刻蝕是把硅片表面曝露于氣態(tài)中產(chǎn)生的等離子體，等離子體通過光刻膠中開出的窗口，與硅片發(fā)生物理或化學反應（或這兩種反應），從而去掉曝露的表面材料。干法刻蝕是亞微米尺寸下刻蝕器件的較重要方法。而在濕法腐蝕中，液體化學試劑（如酸、堿和溶劑等）以化學方式去除硅片表面的材料。濕法腐蝕一般只是用在尺寸較大的情況下（大于3微米）。濕法腐蝕仍然用來腐蝕硅片上某些層或用來去除干法刻蝕后的殘留物。當需要處理多層薄膜時，以及刻蝕中必須精確停在某個特定薄膜層而不對其造成損傷時。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="吉林ICP材料刻蝕服務,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343069887424/9095478.png"></div><p style="text-indent:25px">等離子刻蝕是將電磁能量（通常為射頻（RF））施加到含有化學反應成分（如氟或氯）的氣體中實現(xiàn)。等離子會釋放帶正電的離子來撞擊晶圓以去除（刻蝕）材料，并和活性自由基產(chǎn)生化學反應，與刻蝕的材料反應形成揮發(fā)性或非揮發(fā)性的殘留物。離子電荷會以垂直方向射入晶圓表面。這樣會形成近乎垂直的刻蝕形貌，這種形貌是現(xiàn)今密集封裝芯片設計中制作細微特征所必需的。一般而言，高蝕速率（在一定時間內(nèi)去除的材料量）都會受到歡迎。反應離子刻蝕（RIE）的目標是在物理刻蝕和化學刻蝕之間達到較佳平衡，使物理撞擊（刻蝕率）強度足以去除必要的材料，同時適當?shù)幕瘜W反應能形成易于排出的揮發(fā)性殘留物或在剩余物上形成保護性沉積（選擇比和形貌控制）。采用磁場增強的RIE工藝，通過增加離子密度而不增加離子能量（可能會損失晶圓）的方式，改進了處理過程。深硅刻蝕是MEMS器件制作當中一個很重要的工藝。黑龍江氧化硅材料刻蝕外協(xié)</p><p style="text-indent:25px">有圖形刻蝕采用掩蔽層來定義要刻蝕掉的表面材料區(qū)域，只有硅片上被選擇的這一部分在刻蝕過程中刻掉。吉林ICP材料刻蝕服務</p><p style="text-indent:25px">鋁膜濕法刻蝕：對于鋁和鋁合金層有選擇性的刻蝕溶液是居于磷酸的。遺憾的是，鋁和磷酸反應的副產(chǎn)物是微小的氫氣泡。這些氣泡附著在晶圓表面，并阻礙刻蝕反應。結(jié)果既可能產(chǎn)生導致相鄰引線短路的鋁橋連，又可能在表面形成不希望出現(xiàn)的雪球的鋁點。特殊配方鋁刻蝕溶液的使用緩解了這個問題。典型的活性溶液成分配比是：16：1：1：2。除了特殊配方外，典型的鋁刻蝕工藝還會包含以攪拌或上下移動晶圓舟的攪動。有時超聲波或兆頻超聲波也用來去除氣泡。吉林ICP材料刻蝕服務</p><p style="text-indent:25px">廣東省科學院半導體研究所致力于電子元器件，以科技創(chuàng)新實現(xiàn)***管理的追求。廣東省半導體所深耕行業(yè)多年，始終以客戶的需求為向?qū)?，為客戶提?**的微納加工技術(shù)服務，真空鍍膜技術(shù)服務，紫外光刻技術(shù)服務，材料刻蝕技術(shù)服務。廣東省半導體所繼續(xù)堅定不移地走高質(zhì)量發(fā)展道路，既要實現(xiàn)基本面穩(wěn)定增長，又要聚焦關鍵領域，實現(xiàn)轉(zhuǎn)型再突破。廣東省半導體所始終關注電子元器件市場，以敏銳的市場洞察力，實現(xiàn)與客戶的成長共贏。</p></p><br /><p>文章來源地址: http://m.cdcfah.com/cp/2597826.html</p></div></div></div></div></div><div id="jq28y2p" class="page-right twoColRt"><div id="vnmyvsp" class="box01 margin10 clearfix"><h3><a href="http://m.cdcfah.com/cp/">猜你喜歡</a></h3><div id="dsum3sk" class="recomPic likePro"><a 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